一種取得與分析物體表面形貌的光學量測系統

工研院創新前瞻技術研究計畫

魏祥鈞,郭仲倫,卓嘉弘,羅竣威,劉志祥

一種光學量測系統，包含將入射光束分為參考光束及原始量測光束的偏振分光鏡、接收並反射原始量測光束而形成第一反射量測光束的第一分光鏡、接收並調變第一反射量測光束的反射方向而形成調變量測光束的空間光調變器、接收並聚焦調變量測光束以照射於待測物而形成穿透量測光束的聚光鏡、接收並轉換穿透量測光束為平行量測光束的物鏡、接收並反射平行量測光束而形成第二反射量測光束的反射鏡、接收並反射參考光束以使其與第二反射量測光束具相同路徑的第二分光鏡，以及接收參考光束與第二反射量測光束之干涉訊號以產生待測物影像的相機。

A optical measurement system comprises a polarization beam splitter for dividing an incident beam into a reference beam and an original measurement beam, a first beam splitter for receiving the measurement beam and reflecting it to form a first reflected measurement beam, a spatial light modulator receiving the first reflected measurement beam and modulate its reflection direction to form a modulated measurement beam, a condenser lens for receiving the modulated measurement beam and focusing it to a sample to be measured so as to form a penetrating measurement beam, an objective lens for receiving the penetrating measurement beam and converting it into a parallel measurement beam, a mirror for receiving and reflecting the parallel measurement beam to form a second reflected measurement beam, a second beam splitter for receiving the reference beam and reflecting it to a path coincident with a path of the second reflected measurement beam, and a camera for receiving an interference signal generated from interference between the reference beam and the second reflected measurement beam to generate an image of the sample to be measured.