製程品質效能優化模組

巨量資料創新技術與智慧應用計畫

藉由連續製程所收集的數據，可透過製程產品品質的監控，進行製程關鍵影響參數判別。並依製程狀態變化進行監測，建立最適化動態調節建模規則，提高製程與產品品質穩定性。有助於處理製程具備動態特性下，仍可進行製程產品品質的監控與調整，使得品質可獲得改善。

By collecting data from successive processes and through monitoring of processed product quality, judgment of key influencing parameters of process can be conducted. And monitoring may proceed according to process status to establish the Modeling Rule of Optimized Dynamic Regulation for the elevation of stability of process and product quality that will be helpful to proceed monitoring and adjustment of processed product quality under dynamic characteristics of processing procedures.