溫度估測用參數儲備裝置

工具機智慧零組件關鍵技術開發應用暨性能驗證計畫

本發明係整合一套溫度控制系統的發熱、致冷、熱交換等三種模組，藉由擷取其關鍵量測參數，如發熱模組的表面溫度、載台轉速、驅動馬達電流、載重慣量；致冷模組的出口水溫、入口水溫、出口流量、出口壓力；熱交換模組的流道截面積、長度、接觸面積、熱傳係數等。本控制系統藉由學習階段的數據集建立學習模型，產出一虛擬溫度估測器，此虛擬溫度估測器比起實際的溫度感測器具有更加靈敏與超前感知之能力，可以讓溫度控制迴路提前反應，而不是像一般的做法，需要量測到已產生溫度變化再來調整參數，此時機械結構已發生熱變形。再搭配一套溫度控制策略，可隨著負載端的動態變化自主調整溫度控制命令，使負載端在不同的負載條件下適應性調整指令，讓負載端的溫度波動性有效降低。

The invention integrates the heating, cooling, and heat exchange modules of a temperature control system by capturing its key measurement parameters, such as the surface temperature of the heating module, the rotation speed of the stage, the drive motor current, and the load. Inertia; outlet water temperature, inlet water temperature, outlet flow rate, outlet pressure of the refrigeration module; flow channel cross-sectional area, length, contact area, heat transfer coefficient, etc. of the heat exchange module.This control system establishes a learning model through the data set in the learning stage and produces a virtual temperature estimator. This virtual temperature estimator is more sensitive and has advanced sensing capabilities than the actual temperature sensor, allowing temperature control. The loop responds in advance, instead of the usual practice of measuring temperature changes before adjusting parameters. At this time, the mechanical structure has undergone thermal deformation. Coupled with a temperature control strategy, the temperature control command can be adjusted independently with the dynamic changes of the load end, so that the load end can adaptively adjust the instructions under different load conditions, effectively reducing the temperature fluctuation of the load end.