檢測裝置及發光二極體的檢測方法

工研院創新前瞻技術研究計畫

林雁容、劉志祥、郭仲倫、魏祥鈞、林友崧、羅偕益

一種檢測裝置，用以檢測發光二極體晶圓。檢測裝置包括Z軸移動器、感測探頭、高度量測模組、載台、照明光源及處理元件。感測探頭架設於Z軸移動器上。Z軸移動器適於帶動感測探頭在Z軸上移動。感測探頭包括光電傳感器、分光器及光電感測結構。感測探頭之光電傳感器與高度量測模組的一者適於接收穿透分光器的光束，且感測探頭之光電傳感器與高度量測模組的另一者適於接收被分光器反射的光束。載台用以承載發光二極體晶圓。照明光源用以發出照明光束，以照射發光二極體晶圓。此外，一種發光二極體晶圓的檢測方法也被提出。

An inspection apparatus for inspection a light-emitting diode wafer is provided. The inspection apparatus includes a Z-axis mover, a sensing probe, a height measurement module, a carrier, an illumination light source and a processing element. The sensing probe is erected on the Z-axis mover. The Z-axis mover is adapted to drive the sensing probe to move along a Z-axis. The sensing probe includes a photoelectric sensor, a beam splitter and a photoelectric sensing structure. One of the photoelectric sensor of the sensing probe and the height measurement module is adapted to receive a light beam penetrating the beam splitter, and the other of the photoelectric sensor of the sensing probe and the height measurement module is adapted to receive a light beam reflected by the beam splitter beam. The carrier is adapted to carry the light-emitting diode wafer. The illumination light source is adapted to emit an illumination beam to illuminate the light-emitting diode wafer. In addition, an inspection method for inspecting a light-emitting diode wafers is also provided.