微流道感測晶片及其量測系統

工研院創新前瞻技術研究計畫

黎宇泰,林家任,林瑋佑,林高祺,謝卓帆,吳登峻

一種微流道感測晶片包含一本體、至少一微流道以及一超材料層。本體包含基板及上蓋，上蓋具有至少一通口。至少一微流道形成在基板上且具有承載表面，其中至少一微流道連通至少一通口。超材料層係塗覆於承載表面上，其中超材料層具有多個區域，且每一該些區域具有對應的共振圖案。

A microfluidic sensor chip includes: a body, at least one microfluidic channel and a metamaterial layer. The body includes a substrate and an upper cover, wherein the upper cover has at least one opening. The at least one microfluidic channel is formed on the substrate and has a bearing surface, wherein the at least one microfluidic channel communicates with the at least one opening. The metamaterial layer is coated on the bearing surface, wherein the metamaterial layer has a plurality of areas, and each of the areas has a corresponding resonance pattern.